The Principle and Application of Scanning Electron Microscope

Date：2023-10-19 17:18:24Views：335

Scanning Electron Microscopy (SEM) is a high-resolution microscopy technique that uses signals generated by the interaction between an electron beam and a sample to observe the morphology, structure, and composition of the sample surface. This article will introduce the principles and applications of scanning electron microscopy.

The principle of scanning electron microscopy is to observe the morphology, structure, and composition of the sample surface using signals generated by the interaction between the electron beam and the sample. After entering the scanning electron microscope, the electron beam is focused by an electron lens to form a high-energy electron beam, which is then scanned on the surface of the sample through a scanning coil. When the electron beam interacts with the surface of the sample, various signals are generated, such as secondary electrons, reflected electrons, scattered electrons, transmitted electrons, etc. These signals are received by the detector and converted into electrical signals, which are processed to form images.

The applications of scanning electron microscopy in the field of electronic components are as follows:

1. Observation of surface morphology of components

SEM can be used to observe the surface morphology of various electronic components, including chips, transistors, capacitors, inductors, etc. Observing the surface morphology of components through SEM can detect the manufacturing quality and defects of components, such as surface flatness, surface roughness, surface defects, etc. In addition, SEM can also be used to observe surface corrosion, oxidation, and other phenomena of components, in order to gain a deeper understanding of the service life and stability of components.

2. Internal structure observation of components

SEM can also be used to observe the internal structure of electronic components, such as the structure of transistors, the electrode structure of capacitors, and the coil structure of inductors. Observing the internal structure of components through SEM can detect the manufacturing quality and defects of components, such as poor coil contact and electrode detachment. In addition, SEM can also be used to observe the internal structural changes of components, such as the leakage current of transistors and capacitors, in order to gain a deeper understanding of the service life and stability of components.

3. Analysis of component materials

SEM can also be used to analyze the material composition and structure in electronic components. For example, SEM can be used to observe metal circuits in transistors, electrode materials in capacitors, and coil materials in inductors. By analyzing the material composition and structure of components through SEM, the performance and characteristics of components can be understood, thereby guiding the design and manufacturing of components.

4. Component failure analysis

SEM can also be used to analyze the causes of faults in electronic components. For example, SEM can be used to observe phenomena such as leakage current in transistors and leakage in capacitors, in order to gain a deeper understanding of the causes of component failures. In addition, SEM can also be used to observe phenomena such as thermal failure and electromagnetic interference of components, in order to gain a deeper understanding of the fault mechanism of components.

The above is an introduction to the principles and applications of scanning electron microscopy, hoping to provide you with some reference! SEM will play a more important role in electronic components, providing more accurate characterization and analysis methods for the manufacturing and research of electronic components.